|The JXA-8900 SuperProbe is an Electron Probe Microanalyzer (EPMA). The combination of up to 4 wavelength dispersive X-ray spectrometers (WDS) and an energy dispersive X-ray spectrometer (EDS) assures the most efficient and accurate analysis. Computer input analyzes data from the two types of X-ray spectrometers and presents the data as a unified analysis. The WD/ED combined system can simultaneously analyze up to 12 elements (4 WDS, 8 EDS).|
The WD/ED combined microanalyzer provides for:The automated stage can handle samples up to 6" x 6" x 2" through the airlock, and can reposition a sample to less than 0.5um.